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基于DSP增益可控的光刻机测高电路的设计研究
2021年电子技术应用第8期
赵英伟,郝晓亮,张文雅,马培圣,文黎波
中国电子科技集团公司第十三研究所,河北 石家庄050051
摘要: 介绍了激光三角法高度测量技术和基于数字信号处理器DSP与线阵CCD的激光高度测量系统。采用比例恒流源和镜像恒流源组合,设计了输出功率稳定可调的激光二极管驱动电路和线阵CCD的驱动电路,借助DSP定时器周期调节灵活的优点,方便地调节光积分时间来提高信号质量。针对光刻工艺中不同的测量对象表面的光学特征,自动进行激光二极管增益控制和光积分时间调节,提高测量的适应性和测量效率。
中图分类号: TN405
文献标识码: A
DOI:10.16157/j.issn.0258-7998.201252
中文引用格式: 赵英伟,郝晓亮,张文雅,等. 基于DSP增益可控的光刻机测高电路的设计研究[J].电子技术应用,2021,47(8):120-122,132.
英文引用格式: Zhao Yingwei,Hao Xiaoliang,Zhang Wenya,et al. Design and research of height measuring circuit based on DSP with adjustable gain for the lithography machine[J]. Application of Electronic Technique,2021,47(8):120-122,132.
Design and research of height measuring circuit based on DSP with adjustable gain for the lithography machine
Zhao Yingwei,Hao Xiaoliang,Zhang Wenya,Ma Peisheng,Wen Libo
The 13th Research Institute of China Electronics Technology Group Coporation,Shijiazhuang 050051,China
Abstract: This article briefly introduces the laser triangulation height measurement technology, and the laser height measurement system based on digital signal processor DSP and linear array CCD. Using a combination of proportional constant current source and mirror constant current source, a laser diode drive circuit with stable and adjustable output power is designed. The driving circuit of the linear CCD is given. With the advantage of flexible adjustment of the DSP timer period, it is convenient to adjust the light integration time to improve the signal quality.According to the optical characteristics of different measuring object surfaces, the laser diode gain control and light integration time adjustment are automatically performed to improve the adaptability and efficiency of measurement.
Key words : laser triangulation;linear array CCD;digital signal processor DSP;lithography machine

0 引言

    光刻工艺是大规模集成电路生产中的关键工艺。为了在晶圆上获得高分辨率的光刻图形,光刻设备必须尽可能精确地将晶圆平行放置到镜头的焦平面上。

    如果晶圆在工件台上的高度出现变化,会导致聚焦偏差,引起束斑或光斑增大,加工的线条模糊,曝光图形出现拼接缺陷等问题[1]

    所以高度测量系统要能够精确测量,能够对不同的晶圆厚度,胶层厚度或者温度和气压所引起的聚焦位置变化等因素的影响进行补偿[2]




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作者信息:

赵英伟,郝晓亮,张文雅,马培圣,文黎波

(中国电子科技集团公司第十三研究所,河北 石家庄050051)




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